Dielectric Coatings for the Semiconductor Industry

Semiconductor Equipment Applications- Dielectric Coatings

An overview of dielectric coatings for the semiconductor industry

Thermal spray technology allows semiconductor manufacturers to take advantage of the dielectric properties of certain ceramics without machining. Aluminum oxide is currently in production for the semiconductor industry and features enhanced characteristics as a result of the unique APS process, including a superior tensile strength of 7505 psi or better, increased quality of dielectric properties, and increased density that allows the surface to be ground to a superior finish of 10 microinches or better. The process is executed under complete automation and process control to help eliminate risk of contamination and inconsistency.

E-chucks

The semi-conductor manufacturing equipment industry utilizes APS Materials, Inc.'s thermal sprayed ceramics for dielectric layers on metal electrostatic chucks. These high-purity, dielectric coatings are very dense, highly durable, and provide long operating life, high breakdown voltage (4000+ volts), as well as comparatively short de-chucking times. APS has served this industry with high-purity ceramic dielectric coatings for over 5 consecutive years, and our expertise in this field is unsurpassed.

Dielectric materials:

§ Al203 (Alumina)
§ Y2O3 (Yttria)
§ Al2O3/TiO2 (Alumina-Titania)
§ Y2O3/AlO3 (Yttria-Alumina)