Ceramic Coatings for the Semiconductor Industry

Semiconductor Equipment Applications- Ceramic Coatings

An overview of ceramic coatings for the semiconductor industry

In the Electronics/Semiconductor industry, ceramic coatings provide chemical, corrosion, and/or erosion resistance, as well as enhanced thermal conductivity heat resistance, and resistance to abrasion. Thermal sprayed ceramics exhibit unique beneficial surface characteristics, such as dielectric properties (see link) and particle "gettering" properties.

Bell Jars, Domes, Deposition Rings, Baffle Plates

APS Materials, Inc. is experienced in applying a variety of different coatings to all sorts of semiconductor equipment components. These coatings can provide corrosion resistance, erosion resistance, enhanced thermal conductivity and/or dielectric properties, depending on the application. Custom coatings are frequently engineered by APS Materials, Inc. in order to meet the specific requirements of a new or unusual application. There are also numerous cases where a plasma spray coated metal component provided a more durable, less costly alternative to a solid ceramic, quartz, carbide or nitride part.

PVD/CVD Metal Etch Chambers

In the corrosive environment of semiconductor manufacturing, ceramic coatings provide superior corrosion and wear resistance that dramatically extends the life of your equipment. A proprietary plasma sprayed coating, engineered by APS Materials, Inc., is currently being used as corrosion resistance in metal etch chambers. This coating extends the overall life of etch chambers by more than 30 times, compared to conventional coatings or anodizing.